Formation of ZrO2 gate dielectric on Ge substrate by thermal oxidation and post annealing for metal-oxide-semiconductor devices /
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| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2019.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/11120/ |
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| 001 | u1123798 | ||
| 003 | SIRSI | ||
| 005 | 201910041018 | ||
| 008 | 191004s2019 my a m 000 0 eng | ||
| 040 | |a UMM |d UMJ |e rda | ||
| 090 | |a TJ7 |b UMP 2019 Lei | ||
| 097 | |a TJ7 |b UMP 2019 Lei | ||
| 100 | 1 | |a Lei, Zhen Ce, |e author. | |
| 245 | 1 | 0 | |a Formation of ZrO2 gate dielectric on Ge substrate by thermal oxidation and post annealing for metal-oxide-semiconductor devices / |c Lei Zhen Ce. |
| 264 | 1 | |c 2019. | |
| 300 | |a xxiv, 181 leaves : |b illustrations ; |c 30 cm | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a unmediated |2 rdamedia | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a volume |2 rdacarrier | ||
| 338 | |a computer disc |2 rdacarrier | ||
| 502 | |b Ph.D. |c Jabatan Kejuruteraan Mekanik, Fakulti Kejuruteraan, Universiti Malaya |d 2019. | ||
| 504 | |a Bibliography: leaves 160-180. | ||
| 530 | |a Also issued in CD. | ||
| 650 | 0 | |a Metal oxide semiconductors. | |
| 650 | 0 | |a Metals |x Thermal conductivity. | |
| 650 | 0 | |a Metals |x Oxidation. | |
| 650 | 0 | |a Germanium. | |
| 650 | 0 | |a Zirconium. | |
| 650 | 0 | |a Sputtering (Physics) | |
| 650 | 0 | |a Annealing of metals. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Kejuruteraan Mekanik, |e degree granting institution. | |
| 856 | 4 | 1 | |u http://studentsrepo.um.edu.my/11120/ |
| 596 | |a 1 7 25 | ||
| 900 | |a NSM AMA | ||
| 999 | |a TJ7 UMP 2019 LEI |w LC |c 1 |i A517375690 |f 16/10/2019 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 16/10/2019 |1 STEM | ||
| 999 | |a TJ7 UMP 2019 LEI |w LC |c 1 |i A517198014 |f 21/5/2020 |g 1 |l STACKS |m P25UMARCHI |r N |s Y |t CD |u 21/5/2020 |1 STEM | ||
| 999 | |a TJ7 UMP 2019 LEI |w LC |c 1 |i A517442933 |f 20/10/2020 |g 1 |l STACKS |m P07JURUTER |r Y |s Y |t TESIS |u 20/10/2020 |1 STEM | ||