Electron beam testing of integrated circuits using a modified scanning electron microscope /

Electron beam testing of integrated circuits using a modified scanning electron microscope /

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Bibliographic Details
Main Author: Sim, Kian Sin
Format: Thesis Book
Language:English
Published: 1990.
Subjects:
Probes (Electronic instruments)
Integrated circuits > Very large scale integration > Testing.
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Description
Item Description:Photocopy.
Physical Description:xvii, 156 leaves : ill. ; 30 cm.
Bibliography:Bibliography: leaves 148-156.

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