Electron beam testing of integrated circuits using a modified scanning electron microscope /

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Bibliographic Details
Main Author: Sim, Kian Sin
Format: Thesis Book
Language:English
Published: 1990.
Subjects:
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008 920402s1990 si v 00 1 eng m
035 |a AAR-8346 
040 |a UMM 
090 |a TK7878.6  |b Sim 
100 1 0 |a Sim, Kian Sin. 
245 1 0 |a Electron beam testing of integrated circuits using a modified scanning electron microscope /  |c by Sim Kian Sin. 
260 |c 1990. 
300 |a xvii, 156 leaves :  |b ill. ;  |c 30 cm. 
500 |a Photocopy. 
502 |a Dissertation (M.Eng.) -- National University of Singapore, 1990. 
504 |a Bibliography: leaves 148-156. 
650 0 |a Probes (Electronic instruments) 
650 0 |a Integrated circuits  |x Very large scale integration  |x Testing. 
948 |a 02/04/1992  |b 04/09/2002 
596 |a 1 
999 |a TK7878.6 SIM  |w LC  |c 1  |i A011065215  |l STACKS  |m P01UTAMA  |r Y  |s Y  |t TESIS  |u 15/4/1992