Plasma deposited silicon oxide : preparation and physical characterization /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
Kuala Lumpur,
1992.
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| Item Description: | PPZ. Microfiche. Kuala Lumpur : University of Malaya Library, 2000. 3 fiches : negative ; 11 x 15 cm. |
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| Physical Description: | 235 leaves ; 29 cm. |