Plasma deposited silicon oxide : preparation and physical characterization /
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| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
Kuala Lumpur,
1992.
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| Subjects: | |
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| 001 | u311523 | ||
| 003 | SIRSI | ||
| 008 | 930311s1992 my t eng m | ||
| 035 | |a ABM-6943 | ||
| 040 | |a UMM | ||
| 043 | |a a-my--- | ||
| 090 | |a QC611.8 |b S5Won | ||
| 091 | |a Microfiche 14440 | ||
| 100 | 1 | 0 | |a Wong, King Seng. |
| 245 | 1 | 0 | |a Plasma deposited silicon oxide : preparation and physical characterization / |c by Wong King Seng. |
| 260 | |a Kuala Lumpur, |c 1992. | ||
| 300 | |a 235 leaves ; |c 29 cm. | ||
| 500 | |a PPZ. | ||
| 500 | |a Microfiche. Kuala Lumpur : University of Malaya Library, 2000. 3 fiches : negative ; 11 x 15 cm. | ||
| 502 | |a Dissertation (M.Sc.) -- Dept. of Physics, University of Malaya, 1993. | ||
| 650 | 0 | |a Silicon oxide |x Properties. | |
| 650 | 0 | |a Glow discharges. | |
| 650 | 0 | |a Plasma glow dischages. | |
| 710 | 2 | 0 | |a Universiti Malaya. |b Fakulti Sains. |
| 948 | |a 11/03/1993 |b 05/12/2000 | ||
| 596 | |a 1 | ||
| 999 | |a QC611.8 S5WON |w LC |c 1 |i A011197618 |d 14/12/1998 |l STACKS |m P01UTAMA |n 9 |r Y |s Y |t TESIS |u 11/3/1993 | ||