A study of specimen charging in electron beam systems /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1994.
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| Subjects: | |
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| LEADER | 00764cam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | u368688 | ||
| 003 | SIRSI | ||
| 008 | 950307s1994 si v 00 1 eng m | ||
| 035 | |a ABV-2761 | ||
| 040 | |a UMM | ||
| 090 | |a QC793.5 |b E626Sim | ||
| 100 | 1 | 0 | |a Sim, Kian Sin. |
| 245 | 1 | 2 | |a A study of specimen charging in electron beam systems / |c by Sim Kian Sin. |
| 260 | |c 1994. | ||
| 300 | |a viii, 234 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Thesis (Ph.D.) -- National University of Singapore, 1994. | ||
| 504 | |a Bibliography: leaves 217-233. | ||
| 650 | 0 | |a Electron beams |x Industrial applications | |
| 650 | 0 | |a Electrons |x Emission | |
| 948 | |a 07/03/1995 |b 25/11/2000 | ||
| 596 | |a 1 | ||
| 999 | |a QC793.5 E626SIM |w LC |c 1 |i A505731239 |d 11/7/1997 |l STACKS |m P01UTAMA |n 2 |r Y |s Y |t TESIS |u 1/7/1996 | ||