Electron beam induced current/tunneling current microscopy of thin silicon dioxide films on silicon /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1994.
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| LEADER | 00876cam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | u379971 | ||
| 003 | SIRSI | ||
| 008 | 851001s1994 si v 00 eng m | ||
| 035 | |a ABX-1350 | ||
| 040 | |a UMM | ||
| 090 | |a TK7874 |b Pey | ||
| 100 | 1 | 0 | |a Pey, Kin San |
| 245 | 1 | 0 | |a Electron beam induced current/tunneling current microscopy of thin silicon dioxide films on silicon / |c Pey Kin San. |
| 260 | |c 1994. | ||
| 300 | |a xi, 168 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 1994. | ||
| 504 | |a Bibliography: leaves 145-150. | ||
| 650 | 0 | |a Electron beams |x Industrial applications. | |
| 650 | 0 | |a Metal oxide semiconductors | |
| 650 | 0 | |a Silicon |x Defects | |
| 650 | 0 | |a Secondary ion mass spectrometry. | |
| 948 | |a 23/08/1995 |b 17/08/1998 | ||
| 596 | |a 1 | ||
| 999 | |a TK7874 PEY |w LC |c 1 |i A506003827 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 1/10/1996 | ||