A comparative study of MOS capacitors fabricated on single-crystal and polycrystalline silicon /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1990.
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| LEADER | 00826cam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | u391216 | ||
| 003 | SIRSI | ||
| 008 | 960108s1990 si v 00 1 eng m | ||
| 035 | |a ABY-9839 | ||
| 040 | |a UMM | ||
| 090 | |a TK7871.85 |b Tay | ||
| 100 | 1 | 0 | |a Tay, Tuang Mee. |
| 245 | 1 | 2 | |a A comparative study of MOS capacitors fabricated on single-crystal and polycrystalline silicon / |c by Tay Tuang Mee. |
| 260 | |c 1990. | ||
| 300 | |a xv, 142 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 1990. | ||
| 504 | |a Includes bibliographical references. | ||
| 650 | 0 | |a Metal oxide semiconductors. | |
| 650 | 0 | |a Silicon. | |
| 650 | 0 | |a Polycrystalline semiconductors | |
| 948 | |a 08/01/1996 |b 17/08/1998 | ||
| 596 | |a 1 | ||
| 999 | |a TK7871.85 TAY |w LC |c 1 |i A505458571 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 15/8/1996 | ||