Direct-current plasma glow discharged hydrogenated SiNx alloys : deposition and physical studies /
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| 格式: | Thesis 图书 |
| 语言: | English |
| 出版: |
1996.
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| Item Description: | Microfiche. Kuala Lumpur : University of Malaya Library, 2000. 3 fiche : negative ; 11 x 15 cm. |
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| 实物描述: | v, 214 leaves : [append.] ill., 29 cm. |
| 参考书目: | Includes bibliographical references. |