Direct-current plasma glow discharged hydrogenated SiNx alloys : deposition and physical studies /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1996.
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| LEADER | 01038cam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | u405251 | ||
| 003 | SIRSI | ||
| 008 | 950815s1996 my v 0 eng m | ||
| 035 | |a ACB-8014 | ||
| 040 | |a UMM | ||
| 090 | |a TS695.15 |b Faiar | ||
| 091 | |a Microfiche 14947 | ||
| 100 | 0 | 0 | |a Faidz Abd. Rahman. |
| 245 | 1 | 0 | |a Direct-current plasma glow discharged hydrogenated SiNx alloys : |b deposition and physical studies / |c Faidz Abd. Rahman. |
| 260 | |c 1996. | ||
| 300 | |a v, 214 leaves : [append.] |b ill., |c 29 cm. | ||
| 500 | |a Microfiche. Kuala Lumpur : University of Malaya Library, 2000. 3 fiche : negative ; 11 x 15 cm. | ||
| 502 | |a Dissertation (M.Sc) -- Jabatan Fizik, Universiti Malaya, 1996. | ||
| 504 | |a Includes bibliographical references. | ||
| 650 | 0 | |a Plasma-enhanced chemical vapor deposition. | |
| 650 | 0 | |a Thin films. | |
| 650 | 0 | |a Silicon alloys. | |
| 710 | 2 | 0 | |a Universiti Malaya. |b Jabatan Fizik |
| 948 | |a 05/12/1996 |b 24/06/2002 | ||
| 596 | |a 1 | ||
| 999 | |a TS695.15 FAIAR |w LC |c 1 |i A506428557 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 1/4/1997 | ||