An investigation into the electron beam induced current effects on semiconductor materials and devices /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1995.
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| Subjects: | |
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| LEADER | 00863cam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | u405989 | ||
| 003 | SIRSI | ||
| 008 | 961231s1995 si v 00 1 eng m | ||
| 035 | |a ACB-9525 | ||
| 040 | |a UMM | ||
| 090 | |a TK7871.85 |b Ong | ||
| 100 | 1 | 0 | |a Ong, Vincent Keng Sian. |
| 245 | 1 | 3 | |a An investigation into the electron beam induced current effects on semiconductor materials and devices / |c by Vincent Ong Keng Sian. |
| 260 | |c 1995. | ||
| 300 | |a 269 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Thesis (Ph.D.) -- National University of Singapore, 1995. | ||
| 504 | |a Bibliography: leaves 227-268. | ||
| 650 | 0 | |a Semiconductors |x Testing. | |
| 650 | 0 | |a Electron beams |x Industrial applications. | |
| 650 | 0 | |a Scanning electron microscopes. | |
| 948 | |a 31/12/1996 |b 25/11/2000 | ||
| 596 | |a 1 | ||
| 999 | |a F TK7871.85 ONG |w LC |c 1 |i A506477754 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 28/4/1997 | ||