Studies on a planar coil inductively coupled plasma system and its applications /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1997.
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| LEADER | 00987cam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | u420498 | ||
| 003 | SIRSI | ||
| 008 | 980216s1997 my t 00 1 eng m | ||
| 035 | |a ACE-5911 | ||
| 040 | |a UMM | ||
| 090 | |a QC718.5 |b D5Kok | ||
| 091 | |a Microfiche 14451 | ||
| 100 | 1 | 0 | |a Kok, Yip Cheong. |
| 245 | 1 | 0 | |a Studies on a planar coil inductively coupled plasma system and its applications / |c Kok Yip Cheong. |
| 260 | |c 1997. | ||
| 300 | |a vi, 104 leaves [appendix] : |b ill. ; |c 30 cm. | ||
| 500 | |a Microfiche. Kuala Lumpur : University of Malaya Library, 2000. 2 fiches : negative ; 11 x 15 cm. | ||
| 502 | |a Dissertation (M.Sc) -- Jabatan Fizik, Fakulti Sains, University Malaya, 1997. | ||
| 504 | |a Includes bibliographical references. | ||
| 650 | 0 | |a Plasma diagnostics. | |
| 650 | 0 | |a Plasma engineering. | |
| 710 | 2 | 0 | |a Universiti Malaya. |b Jabatan Fizik. |
| 948 | |a 16/02/1998 |b 09/03/2004 | ||
| 596 | |a 1 | ||
| 999 | |a QC718.5 D5KOK |w LC |c 1 |i A508664208 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 22/4/1999 | ||