Studies on a planar coil inductively coupled plasma system and its applications /

Studies on a planar coil inductively coupled plasma system and its applications /

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書目詳細資料
主要作者:	Kok, Yip Cheong
格式:	Thesis 圖書
語言:	English
出版:	1997.
主題:	Plasma diagnostics. Plasma engineering.
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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