Charging effects in low-voltage scanning electron microscope metrology /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
1997.
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| LEADER | 00675cam a2200217 a 4500 | ||
|---|---|---|---|
| 001 | u425482 | ||
| 003 | SIRSI | ||
| 008 | 980618s1997 si v 00 10 eng m | ||
| 035 | |a ACF-2872 | ||
| 040 | |a UMM | ||
| 090 | |a QH212 |b S3Li | ||
| 100 | 1 | 0 | |a Li, Ou. |
| 245 | 1 | 0 | |a Charging effects in low-voltage scanning electron microscope metrology / |c by Li Ou. |
| 260 | |c 1997. | ||
| 300 | |a iv, 159 leaves : |b ill. ; |c 30 cm. | ||
| 504 | |a Bibliography: leaves 146-155. | ||
| 650 | 0 | |a Low-voltage scanning electron microscopy. | |
| 650 | 0 | |a Electronic measurements. | |
| 948 | |a 18/06/1998 |b 03/08/1998 | ||
| 596 | |a 1 | ||
| 999 | |a QH212 S3LI |w LC |c 1 |i A507920889 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 12/8/1998 | ||