Hydrogenated silicon nitride alloy from DC plasma decomposition : preparation and physical properties /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1998.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/1621 |
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| Item Description: | Microfiche. Kuala Lumpur : University of Malaya Library, 2000. 3 fiches : negative ; 11 x 15 cm. |
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| Physical Description: | iii, 216 leaves [append.] : ill. ; 1997. |
| Bibliography: | Includes bibliographycal references. |