Hydrogenated silicon nitride alloy from DC plasma decomposition : preparation and physical properties /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1998.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/1621 |
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| LEADER | 01119cam a2200289 a 4500 | ||
|---|---|---|---|
| 001 | u426268 | ||
| 003 | SIRSI | ||
| 008 | 970813s1998 my 00 0 eng m | ||
| 035 | |a ACF-3856 | ||
| 040 | |a UMM | ||
| 090 | |a TS695.15 |b Raio | ||
| 091 | |a Microfiche 14948 | ||
| 100 | 0 | 0 | |a Raihan Othman. |
| 245 | 1 | 0 | |a Hydrogenated silicon nitride alloy from DC plasma decomposition : |b preparation and physical properties / |c Raihan bin Othman. |
| 260 | |c 1998. | ||
| 300 | |a iii, 216 leaves [append.] : |b ill. ; |c 1997. | ||
| 500 | |a Microfiche. Kuala Lumpur : University of Malaya Library, 2000. 3 fiches : negative ; 11 x 15 cm. | ||
| 502 | |a Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 1998. | ||
| 504 | |a Includes bibliographycal references. | ||
| 650 | 0 | |a Plasma-enhanced chemical vapor deposition. | |
| 650 | 0 | |a Silicon alloys. | |
| 650 | 0 | |a Thin films. | |
| 710 | 0 | |a Universiti Malaya. |b Jabatan Fizik | |
| 856 | 4 | 1 | |u http://studentsrepo.um.edu.my/id/eprint/1621 |
| 948 | |a 10/07/1998 |b 30/05/2002 | ||
| 596 | |a 1 | ||
| 999 | |a TS695.15 RAIO |w LC |c 1 |i A508303759 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 10/11/1998 | ||