Hydrogenated silicon nitride alloy from DC plasma decomposition : preparation and physical properties /
Saved in:
Main Author: | Raihan Othman |
---|---|
Format: | Thesis Book |
Language: | English |
Published: |
1998.
|
Subjects: | |
Online Access: | http://studentsrepo.um.edu.my/id/eprint/1621 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Similar Items
-
Direct-current plasma glow discharged hydrogenated SiNx alloys : deposition and physical studies /
by: Faidz Abd. Rahman
Published: (1996) -
Hot-wire plasma enhanced chemical vapour deposition system for preparation of silicon carbide thin films /
by: Aniszawati Azis
Published: (2012) -
Effects of hydrogen dilution of silane on the optical and photoluminescence properties of hydrogenated nanocrystalline silicon thin films /
by: Tang, Show Yih
Published: (2008) -
Plasma enhanced chemical vapour deposition of carbon nitride films from ethane and nitrogen gas mixtures /
by: Maisara Othman
Published: (2012) -
Amorphous silicon (a-Si:H)/silicon nitride (a-SiNx:H) superlattice by D.C. plasma enhanced chemical vapour deposition : preparation and characterization /
by: Mitani, Sufian Mousa Ibrahim
Published: (2004)