Laser cleaning of plasma-etch-induced polymers from via holes and other submicron structures on silicon wafers /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1998.
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| LEADER | 00834cam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | u430340 | ||
| 003 | SIRSI | ||
| 008 | 981015s1998 si v 00 1 eng m | ||
| 035 | |a ACF-9290 | ||
| 040 | |a UMM | ||
| 090 | |a TA1677 |b Lee | ||
| 100 | 1 | 0 | |a Lee, Yuan Ping. |
| 245 | 1 | 0 | |a Laser cleaning of plasma-etch-induced polymers from via holes and other submicron structures on silicon wafers / |c by Lee Yuan Ping. |
| 260 | |c 1998. | ||
| 300 | |a xiii, 141 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 1998. | ||
| 504 | |a Bibliography: leaves 136-140. | ||
| 650 | 0 | |a Lasers |x Industrial applications | |
| 650 | 0 | |a Plasma etching. | |
| 650 | 0 | |a Semiconductors |x Etching | |
| 948 | |a 15/10/1998 |b 20/07/2000 | ||
| 596 | |a 1 | ||
| 999 | |a TA1677 LEE |w LC |c 1 |i A508249694 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 3/8/2000 | ||