A robust automatic focusing and astigmatism correction method for the scanning electron microscope /

A robust automatic focusing and astigmatism correction method for the scanning electron microscope /

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Bibliographic Details
Main Author: Ong, Kok Hua
Format: Thesis Book
Language:English
Published: 1998.
Subjects:
Scanning electron microscopes.
Image processing > Digital techniques.
Scanning electron microscopy > Techniques
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Description
Physical Description:xiii, 171 leaves : ill. ; 30 cm.
Bibliography:Bibliography: leaves 134-136.

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