Development of in-line analytical monitoring techniques for IC device fabrication /

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Bibliographic Details
Main Author: Loong, Sang Yee
Format: Thesis Book
Language:English
Published: 1999.
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090 |a QD3  |b NUS 1999 Loo 
100 1 0 |a Loong, Sang Yee. 
245 1 0 |a Development of in-line analytical monitoring techniques for IC device fabrication /  |c by Loong Sang Yee. 
260 |c 1999. 
300 |a x, 85 leaves :  |b ill. ;  |c 30 cm. 
502 |a Dissertation (M.Sc.) -- National University of Singapore, 1999. 
504 |a Bibliography: leaves 81-84. 
948 |a 09/08/1999  |b 01/11/2002 
596 |a 1 
999 |a QD3 NUS 1999 LOO  |w LC  |c 1  |i A509000735  |l B_KOM4  |m P01UTAMA  |r Y  |s Y  |t TESIS  |u 11/11/2002  |o .PUBLIC. BKOM 4 :44483