Development of in-line analytical monitoring techniques for IC device fabrication /
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Format: | Thesis Book |
Language: | English |
Published: |
1999.
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LEADER | 00718cam a2200205 a 4500 | ||
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001 | u443186 | ||
003 | SIRSI | ||
008 | 990805s1999 si v 00 eng m | ||
035 | |a ACH-7229 | ||
040 | |a UMM | ||
090 | |a QD3 |b NUS 1999 Loo | ||
100 | 1 | 0 | |a Loong, Sang Yee. |
245 | 1 | 0 | |a Development of in-line analytical monitoring techniques for IC device fabrication / |c by Loong Sang Yee. |
260 | |c 1999. | ||
300 | |a x, 85 leaves : |b ill. ; |c 30 cm. | ||
502 | |a Dissertation (M.Sc.) -- National University of Singapore, 1999. | ||
504 | |a Bibliography: leaves 81-84. | ||
948 | |a 09/08/1999 |b 01/11/2002 | ||
596 | |a 1 | ||
999 | |a QD3 NUS 1999 LOO |w LC |c 1 |i A509000735 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 11/11/2002 |o .PUBLIC. BKOM 4 :44483 |