Pulsed-laser deposition of microelectronics films /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1999.
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| Subjects: | |
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| LEADER | 00769cam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | u476717 | ||
| 003 | SIRSI | ||
| 008 | 000929s1999 si v 00 1 eng | ||
| 035 | |a ACO-0972 | ||
| 040 | |a UMM | ||
| 090 | |a TK7 |b NUS 1999 Lu | ||
| 100 | 1 | 0 | |a Lu, Liwen |
| 245 | 1 | 0 | |a Pulsed-laser deposition of microelectronics films / |c by Lu Liwen. |
| 260 | |c 1999. | ||
| 300 | |a xi, 65 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 1999. | ||
| 504 | |a Bibliography: leaves 63-65. | ||
| 650 | 0 | |a Pulsed laser deposition. | |
| 650 | 0 | |a Microelectronics. | |
| 900 | |a NHS | ||
| 948 | |a 20/02/2001 |b 05/11/2002 | ||
| 596 | |a 1 | ||
| 999 | |a TK7 NUS 2001 CHE |w LC |c 1 |i A510139101 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 5/11/2002 |o .PUBLIC. BKOM 4 : 45329 | ||