Design and analysis of micromechanical systems for micro electrostatic actuators /

مواد مشابهة

• Electrostatic comb drive for resonant sensor and actuator applications /
  بواسطة: Tang, William Chi-Keung
  منشور في: (1990)
• Design, fabrication, and optimization of micromechanical flexures /
  بواسطة: Cho, Young-Ho
  منشور في: (1990)
• A comparison between electrostatic and thermal actuations in micromirror applications /
  بواسطة: Mahmoud, Mohammed S.
  منشور في: (2010)
• Design of high force density fishbone-shaped electrostatic actuator using finite element /
  بواسطة: Megat Muhammad Ikhsan Megat Hasnan
  منشور في: (2014)
• Modeling of electrostatic actuated mems cantilever beam for application as optical switch
  بواسطة: Leow, Cheah Wei
  منشور في: (2002)