Optical and oxidation studies of plasma enhanced chemical vapour deposited amorphous silicon carbide films /
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2000.
|
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| LEADER | 00780cam a2200205 a 4500 | ||
|---|---|---|---|
| 001 | u489818 | ||
| 003 | SIRSI | ||
| 008 | 990921s2000 si 00 0 eng | ||
| 035 | |a ACR-5194 | ||
| 040 | |a UMM | ||
| 090 | |a TK7 |b NUS 2000 Shi | ||
| 100 | 0 | 0 | |a Shibu Gangadharan. |
| 245 | 1 | 0 | |a Optical and oxidation studies of plasma enhanced chemical vapour deposited amorphous silicon carbide films / |c Shibu Gangadharan. |
| 260 | |c 2000. | ||
| 300 | |a xiv, 160 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 2000. | ||
| 504 | |a Bibliography : leaves 153-156. | ||
| 948 | |a 05/11/2001 |b 05/11/2002 | ||
| 596 | |a 1 | ||
| 999 | |a TK7 NUS 2000 SHI |w LC |c 1 |i A510540882 |d 18/4/2008 |e 18/4/2008 |l B_KOM1 |m P01UTAMA |n 5 |r Y |s Y |t TESIS |u 13/11/2002 |o .CIRCNOTE. BKOM 1: 031156 | ||