Oxidation-induced stacking fault in (100) and (111) silicon wafers /
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2002.
|
| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/2316 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| LEADER | 01068cam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | u502329 | ||
| 003 | SIRSI | ||
| 008 | 990618s2002 my t 00 10 eng m | ||
| 035 | |a ACV-1868 | ||
| 040 | |a UMM | ||
| 090 | |a TA403 |b UM 2002 Lia | ||
| 100 | 1 | 0 | |a Liang, Mei Keat. |
| 245 | 1 | 0 | |a Oxidation-induced stacking fault in (100) and (111) silicon wafers / |c Liang Mei Keat. |
| 260 | |c 2002. | ||
| 300 | |a xiii, 111 leaves : |b ill., (some col.) ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Tech. (Material Sc.)) -- Institut Pengajian Siswazah dan Penyelidikan, Universiti Malaya, 2002. | ||
| 504 | |a Bibliography: p. 101-103. | ||
| 650 | 0 | |a Surface active agents. | |
| 650 | 0 | |a Silicones. | |
| 710 | 2 | 0 | |a Universiti Malaya. |b Institut Pengajian Siswazah dan Penyelidikan. |
| 856 | 4 | 1 | |u http://studentsrepo.um.edu.my/id/eprint/2316 |
| 948 | |a 24/07/2002 |b 04/02/2004 | ||
| 596 | |a 1 | ||
| 999 | |a TA403 UM 2002 LIA |w LC |c 1 |i A510790175 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 18/2/2004 | ||
| 999 | |a TA403 UM 2002 LIA |w LC |c 2 |i A510233231 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 21/8/2002 |o .PUBLIC. BKOM 4 :43069 | ||