APA (7th ed.) Citation

Chew, S. P. (2002). Plasma enhanced physical vapor deposition of titanium nitride thin film.

Chicago Style (17th ed.) Citation

Chew, Sweet Perng. Plasma Enhanced Physical Vapor Deposition of Titanium Nitride Thin Film. 2002.

MLA (8th ed.) Citation

Chew, Sweet Perng. Plasma Enhanced Physical Vapor Deposition of Titanium Nitride Thin Film. 2002.

Warning: These citations may not always be 100% accurate.