Plasma enhanced physical vapor deposition of titanium nitride thin film /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2002.
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| Subjects: | |
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| LEADER | 00860cam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | u502489 | ||
| 003 | SIRSI | ||
| 008 | 000929s2002 my t 00 10 eng m | ||
| 035 | |a ACV-2526 | ||
| 040 | |a UMM | ||
| 090 | |a QC3 |b UM 2002 Che | ||
| 100 | 1 | 0 | |a Chew, Sweet Perng. |
| 245 | 1 | 0 | |a Plasma enhanced physical vapor deposition of titanium nitride thin film / |c by Chew Sweet Perng. |
| 260 | |c 2002. | ||
| 300 | |a viii, 91 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2002. | ||
| 504 | |a Bibliography: leaves 86-91. | ||
| 650 | 0 | |a Thin films. | |
| 650 | 0 | |a Coating processes. | |
| 650 | 0 | |a Physical vapor deposition. | |
| 710 | 2 | 0 | |a Universiti Malaya. |b Jabatan Fizik. |
| 948 | |a 30/07/2002 |b 09/03/2004 | ||
| 596 | |a 1 | ||
| 999 | |a QC3 UM 2002 CHE |w LC |c 1 |i A510824058 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 16/5/2003 | ||