Design of an integrated in situ temperature measurement system for the microlithography process /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2000.
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| LEADER | 00839cam a2200217 a 4500 | ||
|---|---|---|---|
| 001 | u503184 | ||
| 003 | SIRSI | ||
| 008 | 000929s2000 si a v 00 10 eng m | ||
| 035 | |a ACV-4419 | ||
| 040 | |a UMM | ||
| 090 | |a TK7 |b NUS 2000 Luo | ||
| 100 | 1 | 0 | |a Luo, Jun. |
| 245 | 1 | 0 | |a Design of an integrated in situ temperature measurement system for the microlithography process / |c Luo Jun. |
| 260 | |c 2000. | ||
| 300 | |a xi, 94 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 2000. | ||
| 504 | |a Bibliography: leaves 74-78. | ||
| 948 | |a 19/08/2002 |b 08/11/2002 | ||
| 596 | |a 1 | ||
| 999 | |a TK7 NUS 2000 LUO |w LC |c 1 |i A510652403 |l B_KOM1 |m P01UTAMA |r Y |s Y |t TESIS |u 18/11/2002 |o .PUBLIC. BKOM 1 : 030922 | ||
| 999 | |a TK7 NUS 2000 LUO |w LC |c 2 |i A510764239 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 28/11/2002 |o .PUBLIC. BKOM 4 : 45497 | ||