APA (7th ed.) Citation

Tham, T. M. (2001). Design and control of an integrated bake/chill system for the microlithography process.

Chicago Style (17th ed.) Citation

Tham, Tze Minn. Design and Control of an Integrated Bake/chill System for the Microlithography Process. 2001.

MLA (8th ed.) Citation

Tham, Tze Minn. Design and Control of an Integrated Bake/chill System for the Microlithography Process. 2001.

Warning: These citations may not always be 100% accurate.