APA引文

Tham, T. M. (2001). Design and control of an integrated bake/chill system for the microlithography process.

Chicago Style (17th ed.) Citation

Tham, Tze Minn. Design and Control of an Integrated Bake/chill System for the Microlithography Process. 2001.

MLA引文

Tham, Tze Minn. Design and Control of an Integrated Bake/chill System for the Microlithography Process. 2001.

警告：这些引文格式不一定是100％准确.