Characterisation of Ta2O5 thin films for sub-0.25um applications /

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Bibliographic Details
Main Author: Tay, Mark Gek Leng
Format: Thesis Book
Language:English
Published: 2000.
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035 |a ACV-5247 
040 |a UMM 
090 |a TP7  |b NUS 2000 Tay 
100 1 0 |a Tay, Mark Gek Leng. 
245 1 0 |a Characterisation of Ta2O5 thin films for sub-0.25um applications /  |c Tay Gek Leng, Mark. 
260 |c 2000. 
300 |a xix, 190 leaves :  |b ill. ;  |c 30 cm. 
502 |a Dissertation (M.Eng.) -- National University of Singapore, 2001. 
504 |a Bibliography: leaves 188-190. 
948 |a 23/08/2002  |b 08/11/2002 
596 |a 1 
999 |a TP7 NUS 2000 TAY  |w LC  |c 1  |i A510775129  |l B_KOM4  |m P01UTAMA  |r Y  |s Y  |t TESIS  |u 19/11/2002  |o .PUBLIC. bkom 4 : 43185