APA (7th ed.) Citation

Poh, Y. P. (2002). Control, design and simulation of thermal systems in the microlithography process.

Chicago Style (17th ed.) Citation

Poh, Young Peng. Control, Design and Simulation of Thermal Systems in the Microlithography Process. 2002.

MLA (8th ed.) Citation

Poh, Young Peng. Control, Design and Simulation of Thermal Systems in the Microlithography Process. 2002.

Warning: These citations may not always be 100% accurate.