Techniques of etching high aspect ratio trenches for mems applications /

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Bibliographic Details
Main Author: Kok, Kitt-Wai
Format: Thesis Book
Language:English
Published: 2002.
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100 1 0 |a Kok, Kitt-Wai. 
245 1 0 |a Techniques of etching high aspect ratio trenches for mems applications /  |c Kok Kitt-Wai. 
260 |c 2002. 
300 |a xii, 93 leaves :  |b ill. ;  |c 30 cm. 
502 |a Dissertation (M.Eng.) -- National University of Singapore, 2002. 
504 |a Bibliography: leaves 88-93. 
948 |a 09/11/2002  |b 20/11/2002 
596 |a 1 
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