Characterisation of Ta2O5 thin films for sub-0.25 um applications /
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| 格式: | Thesis 圖書 |
| 語言: | English |
| 出版: |
2000.
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| LEADER | 00709nam a2200205 a 4500 | ||
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| 001 | u506638 | ||
| 003 | SIRSI | ||
| 008 | 021119s2000 si a v 00 10 eng m | ||
| 035 | |a ACW-3684 | ||
| 040 | |a UMM | ||
| 090 | |a TP7 |b NUS 200 Tay | ||
| 100 | 1 | 0 | |a Tay, Mark Gek Leng. |
| 245 | 1 | 0 | |b Characterisation of Ta2O5 thin films for sub-0.25 um applications / |c Mark Tay Gek Leng. |
| 260 | |c 2000. | ||
| 300 | |a xix, 190 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 2000. | ||
| 504 | |a Bibliography: leaves 188-190. | ||
| 948 | |a 19/11/2002 |b 19/11/2002 | ||
| 596 | |a 1 | ||
| 999 | |a TP7 NUS 200 TAY |w LC |c 1 |i A510653457 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 3/12/2002 |o .PUBLIC. bkom 4 : 43184 | ||