Transmission electron microscopy of microstructures produced in processing of silikon semiconductor devices /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2001.
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| LEADER | 00762cam a2200205 a 4500 | ||
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| 001 | u506912 | ||
| 003 | SIRSI | ||
| 008 | 021123s2001 si a v 00 10 eng m | ||
| 035 | |a ACW-4539 | ||
| 040 | |a UMM | ||
| 090 | |a TA403 |b NUS 2001 Jia | ||
| 100 | 1 | 0 | |a Jia, Yumin. |
| 245 | 1 | 0 | |a Transmission electron microscopy of microstructures produced in processing of silikon semiconductor devices / |c Jia Yumin. |
| 260 | |c 2001. | ||
| 300 | |a xv, 70 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Sc.) -- National University of Singapore, 2001. | ||
| 504 | |a Bibliography: |a Includes bibliographical references. | ||
| 948 | |a 23/11/2002 |b 23/11/2002 | ||
| 596 | |a 1 | ||
| 999 | |a TA403 NUS 2001 JIA |w LC |c 1 |i A510553485 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 31/12/2002 |o .PUBLIC. BKOM 4 : 45034 | ||