Adhesion measurement of various films on the porous low dielectric the porous low dielectric constant film /
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2001.
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| LEADER | 00749nam a2200205 a 4500 | ||
|---|---|---|---|
| 001 | u511370 | ||
| 003 | SIRSI | ||
| 008 | 030430s2001 si v 00 10 eng m | ||
| 035 | |a ACX-8057 | ||
| 040 | |a UMM | ||
| 090 | |a TJ7 |b NUS 2002 Goh | ||
| 100 | 1 | 0 | |a Goh, Luona Loh Nah |
| 245 | 1 | 0 | |a Adhesion measurement of various films on the porous low dielectric the porous low dielectric constant film / |c Goh Loh Nah, Louna. |
| 260 | |c 2001. | ||
| 300 | |a xi, 101 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 2001. | ||
| 504 | |a Bibliography: leaves 89-95. | ||
| 948 | |a 02/05/2003 |b 02/05/2003 | ||
| 596 | |a 1 | ||
| 999 | |a TJ7 NUS 2002 GOH |w LC |c 1 |i A509836708 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 13/5/2003 |o .PUBLIC. bkom 4 : 45596 | ||