Study on the corrosion behavior of tungsten and titanium in post-etch strippers commonly used in semiconductor manufacturing /

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Bibliographic Details
Main Author: Zhang, Hao
Format: Thesis Book
Language:English
Published: 2002.
Subjects:
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035 |a ACX-8490 
040 |a UMM 
090 |a TP7  |b NUS 2002 Zha 
100 1 0 |a Zhang, Hao 
245 1 0 |a Study on the corrosion behavior of tungsten and titanium in post-etch strippers commonly used in semiconductor manufacturing /  |c by Zhang Hao. 
260 |c 2002. 
300 |a xii, 99 leaves :  |b ill. ;  |c 30 cm. 
502 |a Dissertation (M.Eng.) -- National University of Singapore, 2002. 
504 |a Bibliography: leaves 85-89. 
650 0 |a Tungsten  |x Corrosion. 
650 0 |a Titanium  |x Corrosion. 
650 0 |a Semiconductors. 
900 |a NHS 
948 |a 08/05/2003  |b 08/05/2003 
596 |a 1 
999 |a TP7 NUS 2002 ZHA  |w LC  |c 1  |i A511031037  |l B_KOM4  |m P01UTAMA  |r Y  |s Y  |t TESIS  |u 20/5/2003  |o .PUBLIC. bkom 4 : 43279