Study on the corrosion behavior of tungsten and titanium in post-etch strippers commonly used in semiconductor manufacturing /
Saved in:
Main Author: | |
---|---|
Format: | Thesis Book |
Language: | English |
Published: |
2002.
|
Subjects: | |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
LEADER | 00879nam a2200253 a 4500 | ||
---|---|---|---|
001 | u511642 | ||
003 | SIRSI | ||
008 | 000606s2002 si v 00 1 eng m | ||
035 | |a ACX-8490 | ||
040 | |a UMM | ||
090 | |a TP7 |b NUS 2002 Zha | ||
100 | 1 | 0 | |a Zhang, Hao |
245 | 1 | 0 | |a Study on the corrosion behavior of tungsten and titanium in post-etch strippers commonly used in semiconductor manufacturing / |c by Zhang Hao. |
260 | |c 2002. | ||
300 | |a xii, 99 leaves : |b ill. ; |c 30 cm. | ||
502 | |a Dissertation (M.Eng.) -- National University of Singapore, 2002. | ||
504 | |a Bibliography: leaves 85-89. | ||
650 | 0 | |a Tungsten |x Corrosion. | |
650 | 0 | |a Titanium |x Corrosion. | |
650 | 0 | |a Semiconductors. | |
900 | |a NHS | ||
948 | |a 08/05/2003 |b 08/05/2003 | ||
596 | |a 1 | ||
999 | |a TP7 NUS 2002 ZHA |w LC |c 1 |i A511031037 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 20/5/2003 |o .PUBLIC. bkom 4 : 43279 |