APA (7th ed.) Citation

Lek, C. M. (2002). Development of ultra-thin nitrogen-rich gate oxide process for deep submicron CMOS technology.

Chicago Style (17th ed.) Citation

Lek, Chun Meng. Development of Ultra-thin Nitrogen-rich Gate Oxide Process for Deep Submicron CMOS Technology. 2002.

MLA (8th ed.) Citation

Lek, Chun Meng. Development of Ultra-thin Nitrogen-rich Gate Oxide Process for Deep Submicron CMOS Technology. 2002.

Warning: These citations may not always be 100% accurate.