Scheduling an automated wet-etch station /

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Bibliographic Details
Main Author: Bhusan, Swarnendu
Format: Thesis Book
Language:English
Published: 2002.
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008 000606s2002 si v 00 1 eng m
035 |a ACY-0574 
040 |a UMM 
090 |a TP7  |b NUS 2002 Bhu 
100 1 0 |a Bhusan, Swarnendu. 
245 1 0 |a Scheduling an automated wet-etch station /  |c Swarnendu Bhushan. 
260 |c 2002. 
300 |a xiii, 116 leaves :  |b ill. ;  |c 30 cm. 
502 |a Dissertation (M.Eng.) -- National University of Singapore, 2002. 
504 |a Bibliography: leaves 99-107. 
948 |a 30/05/2003  |b 30/05/2003 
596 |a 1 
999 |a TP7 NUS 2002 BHU  |w LC  |c 1  |i A511117374  |l B_KOM4  |m P01UTAMA  |r Y  |s Y  |t TESIS  |u 5/6/2003  |o .PUBLIC. bkom 4 : 43152