Study of plasma induced charging damage at CMOS gate process /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2002.
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| LEADER | 00716nam a2200205 a 4500 | ||
|---|---|---|---|
| 001 | u514676 | ||
| 003 | SIRSI | ||
| 008 | 030711s2002 si v 00 10 eng m | ||
| 035 | |a ACY-5820 | ||
| 040 | |a UMM | ||
| 090 | |a TK7 |b NUS 2002 Cho | ||
| 100 | 1 | 0 | |a Chong, Daniel Kien Seen |
| 245 | 1 | 0 | |a Study of plasma induced charging damage at CMOS gate process / |c Chong Kien Seen Daniel. |
| 260 | |c 2002. | ||
| 300 | |a xi, 95, [3] leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 2002. | ||
| 504 | |a Bibliography: leaves 88-95. | ||
| 948 | |a 16/07/2003 |b 16/07/2003 | ||
| 596 | |a 1 | ||
| 999 | |a TK7 NUS 2002 CHO |w LC |c 1 |i A511137236 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 23/7/2003 |o .PUBLIC. BKOM 4 : 45930 | ||