Techniques and materials for diffraction-enhanced x-ray lithography /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2002.
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| LEADER | 00697nam a2200205 a 4500 | ||
|---|---|---|---|
| 001 | u518491 | ||
| 003 | SIRSI | ||
| 008 | 910522s2002 si a v 00 10 eng m | ||
| 035 | |a ACZ-6496 | ||
| 040 | |a UMM | ||
| 090 | |a TA403 |b NUS 2002 Kon | ||
| 100 | 1 | 0 | |a Kong, Jong Ren. |
| 245 | 1 | 0 | |a Techniques and materials for diffraction-enhanced x-ray lithography / |c Kong Jong Ren. |
| 260 | |c 2002. | ||
| 300 | |a xiii, 120, [4] leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Sc.) -- National University of Singapore, 2002. | ||
| 504 | |a Includes bibliographical references. | ||
| 948 | |a 08/11/2003 |b 08/11/2003 | ||
| 596 | |a 1 | ||
| 999 | |a TA403 NUS 2002 KON |w LC |c 1 |i A511294683 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 11/11/2003 | ||