Laser-induced formation of titanium silicides and its applications in deep sub-micron technology /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2001.
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| Subjects: | |
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| LEADER | 00869cam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | u691301 | ||
| 003 | SIRSI | ||
| 008 | 000929s2001 si a v 00 10 eng m | ||
| 035 | |a ACV-5727 | ||
| 040 | |a UMM | ||
| 090 | |a QC3 |b NUSP 2001 Che | ||
| 100 | 1 | 0 | |a Chen, Shaoyin. |
| 245 | 1 | 0 | |a Laser-induced formation of titanium silicides and its applications in deep sub-micron technology / |c Chen Shaoyin. |
| 260 | |c 2001. | ||
| 300 | |a viii, 115 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Thesis (Ph.D.) -- Dept. of Physics, Faculty of Science, National University of Singapore, 2001. | ||
| 504 | |a Includes bibliographical references. | ||
| 650 | 0 | |a Titanium alloys. | |
| 650 | 0 | |a Titanium-silicon alloys. | |
| 948 | |a 27/08/2002 |b 11/05/2004 | ||
| 596 | |a 1 | ||
| 999 | |a QC3 NUSP 2001 CHE |w LC |c 1 |i A510785707 |d 4/9/2006 |f 4/9/2006 |g 1 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 4/2/2005 |o .PUBLIC. BKOM 4 : 44433 | ||