Characterization of rapid thermal oxide films /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2001.
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| Subjects: | |
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| LEADER | 00813nam a2200217 a 4500 | ||
|---|---|---|---|
| 001 | u691553 | ||
| 003 | SIRSI | ||
| 008 | 020917s2001 si v 00 1 eng m | ||
| 035 | |a ACV-8955 | ||
| 040 | |a UMM | ||
| 090 | |a TK7 |b NUSP 2001 Lai | ||
| 100 | 1 | 0 | |a Lai, Weng Hong. |
| 245 | 1 | 0 | |a Characterization of rapid thermal oxide films / |c Lai Weng Hong. |
| 260 | |c 2001. | ||
| 300 | |a xiii, 177 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Thesis (Ph.D.) -- Dept. of Electrical & Computer Engineering, Faculty of Engineering, National University of Singapore, 2001. | ||
| 504 | |a Bibliography: leaves 167-172. | ||
| 650 | 0 | |a Rapid thermal processing. | |
| 948 | |a 08/10/2002 |b 08/10/2002 | ||
| 596 | |a 1 | ||
| 999 | |a TK7 NUSP 2001 LAI |w LC |c 1 |i A510772042 |d 24/8/2006 |f 24/8/2006 |g 1 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 21/7/2005 |o .PUBLIC. BKOM 4 :43102 | ||