Fabrication and characterization of submicrometer structures and devices using soft lithography and scanning probe microscopy /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2001.
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| LEADER | 00942cam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | u693337 | ||
| 003 | SIRSI | ||
| 008 | 990106s2001 si a v 00 10 eng m | ||
| 035 | |a ACX-9481 | ||
| 040 | |a UMM | ||
| 090 | |a QD3 |b NUSP 2001 Ng | ||
| 100 | 1 | 0 | |a Ng, Hou Tee. |
| 245 | 1 | 0 | |a Fabrication and characterization of submicrometer structures and devices using soft lithography and scanning probe microscopy / |c Ng Hou Tee. |
| 260 | |c 2001. | ||
| 300 | |a xxiv, 214 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Thesis (Ph.D.) -- Dept. of Chemistry, Faculty of Science, National University of Singapore, 2001. | ||
| 504 | |a Includes bibliographical references. | ||
| 650 | 0 | |a Nanotechnology. | |
| 650 | 0 | |a Scanning probe microscopy. | |
| 650 | 0 | |a Lithography, Electron beam. | |
| 948 | |a 21/05/2003 |b 10/05/2004 | ||
| 596 | |a 1 | ||
| 999 | |a QD3 NUSP 2001 NG |w LC |c 1 |i A511113421 |d 17/7/2006 |f 17/7/2006 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 14/2/2005 |o .PUBLIC. BKOM 4 : 44762 | ||