Deposition of diamond and diamondlike carbon films using RF plasma /
Saved in:
Main Author: | |
---|---|
Format: | Thesis Book |
Language: | English |
Published: |
2004.
|
Subjects: | |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
LEADER | 00840cam a2200241 a 4500 | ||
---|---|---|---|
001 | u697884 | ||
003 | SIRSI | ||
008 | 040825s2004 my a t 00 1 eng m | ||
035 | |a ADC-3452 | ||
040 | |a UMM | ||
090 | |a QC3 |b UM 2004 Tan | ||
100 | 1 | 0 | |a Tan, Chian Hong. |
245 | 1 | 0 | |a Deposition of diamond and diamondlike carbon films using RF plasma / |c Tan Chian Hong. |
260 | |c 2004. | ||
300 | |a vi, 124 leaves : |b ill. ; |c 30 cm. | ||
502 | |a Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2004. | ||
504 | |a Bibliography: leaves 113-114. | ||
650 | 0 | |a Diamond thin films. | |
650 | 0 | |a Plasma diagnostics. | |
710 | 2 | 0 | |a Universiti Malaya. |b Jabatan Fizik. |
948 | |a 25/08/2004 |b 25/09/2004 | ||
596 | |a 1 | ||
999 | |a QC3 UM 2004 TAN |w LC |c 1 |i A511668289 |d 10/8/2006 |f 10/8/2006 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 10/8/2006 |