Deposition of diamond and diamondlike carbon films using RF plasma /

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Bibliographic Details
Main Author: Tan, Chian Hong
Format: Thesis Book
Language:English
Published: 2004.
Subjects:
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035 |a ADC-3452 
040 |a UMM 
090 |a QC3  |b UM 2004 Tan 
100 1 0 |a Tan, Chian Hong. 
245 1 0 |a Deposition of diamond and diamondlike carbon films using RF plasma /  |c Tan Chian Hong. 
260 |c 2004. 
300 |a vi, 124 leaves :  |b ill. ;  |c 30 cm. 
502 |a Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2004. 
504 |a Bibliography: leaves 113-114. 
650 0 |a Diamond thin films. 
650 0 |a Plasma diagnostics. 
710 2 0 |a Universiti Malaya.  |b Jabatan Fizik. 
948 |a 25/08/2004  |b 25/09/2004 
596 |a 1 
999 |a QC3 UM 2004 TAN  |w LC  |c 1  |i A511668289  |d 10/8/2006  |f 10/8/2006  |g 1  |l STACKS  |m P01UTAMA  |r Y  |s Y  |t TESIS  |u 10/8/2006