Preparation and characterization of deposited 3C-SiC films for electronic applications /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2004.
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| LEADER | 01195cam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | u698202 | ||
| 003 | SIRSI | ||
| 008 | 910522s2004 my a t 00 10 eng m | ||
| 035 | |a ADC-5303 | ||
| 040 | |a UMJ |d UMM | ||
| 090 | |a TA7 |b UM 2004 Busar | ||
| 097 | |a TA7 |b UM 2004 Busar | ||
| 100 | 0 | 0 | |a Bushroa Abdul Razak. |
| 245 | 1 | 0 | |a Preparation and characterization of deposited 3C-SiC films for electronic applications / |c Bushroa Abdul Razak. |
| 260 | |c 2004. | ||
| 270 | 1 | |g Bushrao Abdul Razak. |a Universiti Malaya. Fakulti Kejuruteraan Rekabentuk & Pembuatan. | |
| 300 | |a ix, 99 leaves |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.Sc.) -- Jabatan Kejuruteraan Mekanik, Fakulti Kejuruteraan, Universiti Malaya, 2004. | ||
| 504 | |a Includes bibliography references. | ||
| 650 | 0 | |a Thin films |x Electric properties. | |
| 650 | 0 | |a Semiconductor films. | |
| 710 | 2 | 0 | |a Universiti Malaya. |b Jabatan Kejuruteraan Mekanik. |
| 948 | |a 13/09/2004 |b 15/10/2004 | ||
| 596 | |a 1 7 | ||
| 999 | |a TA7 UM 2004 BUSAR |w LC |c 1 |i A511654034 |d 10/8/2006 |f 10/8/2006 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 17/2/2005 | ||
| 999 | |a TA7 UM 2004 BUSAR |w LC |c 1 |i A511881726 |d 23/7/2008 |f 23/7/2008 |g 1 |l STACKS |m P07JURUTER |r Y |s Y |t TESIS |u 17/7/2008 | ||