Mitani, S. M. I. (2004). Amorphous silicon (a-Si:H)/silicon nitride (a-SiNx:H) superlattice by D.C. plasma enhanced chemical vapour deposition: Preparation and characterization.
Chicago Style (17th ed.) CitationMitani, Sufian Mousa Ibrahim. Amorphous Silicon (a-Si:H)/silicon Nitride (a-SiNx:H) Superlattice by D.C. Plasma Enhanced Chemical Vapour Deposition: Preparation and Characterization. 2004.
MLA (8th ed.) CitationMitani, Sufian Mousa Ibrahim. Amorphous Silicon (a-Si:H)/silicon Nitride (a-SiNx:H) Superlattice by D.C. Plasma Enhanced Chemical Vapour Deposition: Preparation and Characterization. 2004.
Warning: These citations may not always be 100% accurate.