Amorphous silicon (a-Si:H)/silicon nitride (a-SiNx:H) superlattice by D.C. plasma enhanced chemical vapour deposition : preparation and characterization /

相似書籍

• Hydrogenated amorphous silicon by pulsed plasma enhanced chemical vapour deposition technique /
  由: Goh, Boon Tong
  出版: (2005)
• Hydrogenated amorphous silicon prepared by d.c. plasma enhanced chemical vapour deposition of helium diluted silane /
  由: Roszairi Haron
  出版: (2004)
• Effect of annealing on direct current and pulse PECVD hydrogenated amorphous silicon /
  由: Lim, Seck Chai
  出版: (2004)
• Direct-current plasma glow discharged hydrogenated SiNx alloys : deposition and physical studies /
  由: Faidz Abd. Rahman
  出版: (1996)
• Plasma enhanced chemical vapour deposition of carbon nitride films from ethane and nitrogen gas mixtures /
  由: Maisara Othman
  出版: (2012)