Characteristics of a pulsed capillary discharge EUV source /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2005.
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| Subjects: | |
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| Physical Description: | vi, 71, [4] leaves : ill. (some col.) ; 30 cm. |
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| Bibliography: | Includes bibliographical references. |