Characteristics of a pulsed capillary discharge EUV source /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2005.
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| Subjects: | |
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| LEADER | 00829cam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | u728470 | ||
| 003 | SIRSI | ||
| 005 | 200610021504 | ||
| 008 | 061002s2005 my t 000 0 eng m | ||
| 040 | |a UMM | ||
| 090 | |a QC3 |b UM 2005 Yap | ||
| 100 | 1 | 0 | |a Yap, Lay Min. |
| 245 | 1 | 0 | |a Characteristics of a pulsed capillary discharge EUV source / |c Yap Lay Min. |
| 260 | |c 2005. | ||
| 300 | |a vi, 71, [4] leaves : |b ill. (some col.) ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2006. | ||
| 504 | |a Includes bibliographical references. | ||
| 650 | 0 | |a Pulsed radiation. | |
| 650 | 0 | |a Ultraviolet radiation. | |
| 710 | 2 | 0 | |a Universiti Malaya. |b Jabatan Fizik. |
| 596 | |a 1 | ||
| 999 | |a QC3 UM 2005 YAP |w LC |c 1 |i A512579909 |d 26/3/2010 |e 26/3/2010 |f 14/2/2007 |g 1 |l STACKS |m P01UTAMA |n 2 |r Y |s Y |t TESIS |u 14/2/2007 | ||