Ng, K. H. (2008). Development of a planar coil radio frequency inductively coupled plasma system for material processing.
Chicago Style (17th ed.) CitationNg, Kim Hooi. Development of a Planar Coil Radio Frequency Inductively Coupled Plasma System for Material Processing. 2008.
MLA (8th ed.) CitationNg, Kim Hooi. Development of a Planar Coil Radio Frequency Inductively Coupled Plasma System for Material Processing. 2008.
Warning: These citations may not always be 100% accurate.