Development of a planar coil radio frequency inductively coupled plasma system for material processing /

Development of a planar coil radio frequency inductively coupled plasma system for material processing /

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Bibliographic Details
Main Author: Ng, Kim Hooi
Format: Thesis Book
Language:English
Published: 2008.
Subjects:
Planar transistors.
Electric coils.
Inductively coupled plasma atomic emission spectrometry.
Radio frequency.
Online Access:http://dspace.fsktm.um.edu.my/handle/1812/490
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Description
Physical Description:xii, 439 leaves : ill. ; 30 cm.
Bibliography:Bibliography: leaves 410-439.

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